Electrical Engineering Glossary Definition for MEMS

Definition

Acronym for Acronym for "Micro Electronic Mechanical Systems," or microelectromechanical systems: Systems that combine mechanical and electrical components and are fabricated using semiconductor fabrication techniques. Common examples are pressure and acceleration sensors which combine the sensor and amplification or conditioning circuitry. Other applications include switches, valves, and waveguides.

Synonyms

• Microelectromechanical systems

Keywords

Microelectromechanical,mems, micro

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